Deposition Mechanism Based on Plasma Spray-Physical Vapor Deposition

Helicon plasma source for ionized physical vapor deposition

A helicon antenna that sits remotely outside the vacuum system is attached to a magnetron sputtering system. This increases the electron temperature, which increases the ionization of the sputter flux for achieving ionized physical vapor deposition (IPVD). There are no shadowing and contamination problems, unlike other IPVD devices with immersed coils, since the helicon antenna is outside the v...

Ti-Cr-N Coatings Deposited by Physical Vapor Deposition on AISI D6 Tool Steels

In this study, physical vapor deposition (PVD) Ti-Cr-N coatings were deposited at two different temperatures 100 and 400ºC on hardened and tempered tool steel substrates. The influence of the applied deposition temperature on the physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and Young’s modulus were evaluated. Phase compositions were st...

Physical Vapor Deposition Simulations of Microstructure Evolution

Hydroxyapatite/silica Nanopowders Deposition on Ti Substrate by Plasma Spray Method

In this work, hydroxyapatite/silica nanopowders were granulated to fabricate plasma sprayable feedstocks. For this purpose, the wet powders obtained by heating a hydroxyapatite/silica slurry were stirred and sieved. To realize the feedstock application in the plasma spray process, powders were deposited on titanium substrate. The morphology of granulated feedstock and sprayed coating was ...

High throughput production of nanocomposite SiOx powders by plasma spray physical vapor deposition for negative electrode of lithium ion batteries

Nanocomposite Si/SiO x powders were produced by plasma spray physical vapor deposition (PS-PVD) at a material throughput of 480 g h-1. The powders are fundamentally an aggregate of primary ∼20 nm particles, which are composed of a crystalline Si core and SiO x shell structure. This is made possible by complete evaporation of raw SiO powders and subsequent rapid condensation of high temperature ...